Remote Plasma Generator for semiconductor cleaning
Remote plasma source families for CVD chamber cleaning; the published table separates semiconductor and display configurations.
| Parameter | Specification |
|---|---|
| Semiconductor NF3 flow and power combinations | 6, 7, 8 or 9 slm at 10 kW; 14 slm at 15 kW |
| Display NF3 flow and power combinations | 36 slm at 18/20 kW; 45 slm at 22 kW; 60 slm at 30 kW |
Who manufactures Remote Plasma Generator for semiconductor cleaning?
New Power Plasma presents this product in its official catalog. Review the linked source and confirm the current model, configuration, manufacturing site and supply terms for your order.
How do I confirm the right specification?
Compare your application against the published parameters above. Share the required dimensions, materials, performance conditions, quantity and destination with Prospera. A published range does not confirm that every configuration is available.
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Independent sourcing information supported by Prospera. Specifications describe the reviewed source, not a guaranteed quotation or certification for your project.