Machinery & equipment
New Power Plasma
Remote Plasma Generator for semiconductor cleaning · RF generators and matching networks
Products and specifications
Machinery & equipment
Remote Plasma Generator for semiconductor cleaning
Remote plasma source families for CVD chamber cleaning; the published table separates semiconductor and display configurations.
| Parameter | Specification |
|---|---|
| Semiconductor NF3 flow and power combinations | 6, 7, 8 or 9 slm at 10 kW; 14 slm at 15 kW |
| Display NF3 flow and power combinations | 36 slm at 18/20 kW; 45 slm at 22 kW; 60 slm at 30 kW |
Machinery & equipment
RF generators and matching networks
RF supply and impedance-matching products for semiconductor, display and solar processes.
Request a model-specific datasheet for dimensions and performance values.
Explore this product → · Official product source ↗Product catalog
Explore the manufacturer’s product pages and request the current model-specific datasheet.
Ask Prospera about these products →