LOT Vacuum · PRODUCT & SPECIFICATIONS
HD-series dry vacuum pumps
Dry vacuum-pump series presented for semiconductor processing. Match the process chemistry and selected pump model.
| Parameter | Specification |
|---|---|
| Pumping-speed series range | 120–9,000 m³/h |
Who manufactures HD-series dry vacuum pumps?
LOT Vacuum presents this product in its official catalog. Review the linked source and confirm the current model, configuration, manufacturing site and supply terms for your order.
How do I confirm the right specification?
Compare your application against the published parameters above. Share the required dimensions, materials, performance conditions, quantity and destination with Prospera. A published range does not confirm that every configuration is available.
Discuss this product →Official source
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