Electronics & semiconductor

LOT Vacuum

XD-series dry vacuum pumps · HD-series dry vacuum pumps · DD-series dry vacuum pumps

Products and specifications

Electronics & semiconductor

Dry vacuum pumps in LOT Vacuum’s semiconductor process portfolio. Pumping speed is a series range, not one model’s rating.

Specifications · XD-series dry vacuum pumps
Parameter	Specification
Pumping-speed series range	1,200–1,800 m³/h

Electronics & semiconductor

Dry vacuum-pump series presented for semiconductor processing. Match the process chemistry and selected pump model.

Specifications · HD-series dry vacuum pumps
Parameter	Specification
Pumping-speed series range	120–9,000 m³/h

Electronics & semiconductor

Dry vacuum-pump family shown in the official semiconductor equipment portfolio.

Specifications · DD-series dry vacuum pumps
Parameter	Specification
Pumping-speed series range	100–6,000 m³/h

Explore the manufacturer’s product pages and request the current model-specific datasheet.