Machinery & equipment
ICD
ICP dry-etching systems
Products and specifications
Machinery & equipment
ICP dry-etching systems
Plasma etching and ashing equipment for OLED and LCD manufacturing. The listed generations are the company’s published application range, not equipment dimensions.
| Parameter | Specification |
|---|---|
| Published mass-production substrate generations | 2, 3, 3.5, 4.5, 5, 5.5, 6, 6H, 8.5 and 10.5 |
Product catalog
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